The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2009
Filed:
Jun. 02, 2004
Jyh-rong Sheu, Hsinchu, TW;
Ching-hsun Chao, Kaohsiung, TW;
Liang-you Jiang, Danshuei Township, Taipei County, TW;
Yu-yang Chang, Tainan, TW;
Cheng-chung Lee, Jhudong Township, Hsinchu County, TW;
Jyh-Rong Sheu, Hsinchu, TW;
Ching-Hsun Chao, Kaohsiung, TW;
Liang-You Jiang, Danshuei Township, Taipei County, TW;
Yu-Yang Chang, Tainan, TW;
Cheng-Chung Lee, Jhudong Township, Hsinchu County, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
A method for fabricating a carbon nanotube field emitter array is disclosed, which has the steps of (a) providing a substrate; (b) forming a cathode layer having a first pattern on the substrate; (c) forming an opaque insulating layer having a second pattern on the substrate, wherein a predetermined part of the cathode layer is exposed; (d) forming a gate layer having the second pattern on the opaque insulating layer; (e) forming a carbon nanotube layer on the entire top surface of the substrate; and (f) exposing the carbon nanotube layer to a light beam coming from the backside of the substrate.