The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2009
Filed:
Apr. 27, 2005
Yasuo Matsumiya, Kawasaki, JP;
Yasuo Matsumiya, Kawasaki, JP;
Fujitsu Microelectronics Limited, Tokyo, JP;
Abstract
A semiconductor device includes a substrate, a semiconductor element formed on the substrate, and a wiring connection testing structure which is formed on the substrate and which includes an electron beam irradiation area where an electron beam is irradiated so that a wiring connection is tested. The wiring connection testing structure includes an insulation layer formed on the substrate, a plurality of first pattern wirings which are formed on the insulation layer in parallel and which include the electron beam irradiation area, a second pattern wiring formed between the first pattern wirings, a third pattern wiring which is formed on a lower layer of the second pattern wiring and which is connected to the second pattern wiring, and a fourth pattern wiring which is formed on an upper layer of the third pattern wiring, is connected to the third pattern wiring, and has the electron beam irradiation area.