The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2009
Filed:
Dec. 06, 2005
Applicants:
Ki-won Nam, Kyoungki-do, KR;
Kyung-won Lee, Kyoungki-do, KR;
Inventors:
Ki-Won Nam, Kyoungki-do, KR;
Kyung-Won Lee, Kyoungki-do, KR;
Assignee:
Hynix Semiconductor Inc., Kyoungki-Do, KR;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for fabricating a semiconductor device is provided. The method includes: forming a plurality of gate lines on a substrate by performing an etching process; forming an oxide layer on the gate lines and the substrate by employing an atomic layer deposition (ALD) method; and sequentially forming a buffer oxide layer and a nitride layer on the oxide layer.