The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2009
Filed:
Dec. 22, 2006
Bharath Rangarajan, Santa Clara, CA (US);
Ramkumar Subramanian, San Jose, CA (US);
Khoi A. Phan, San Jose, CA (US);
Ursula Q. Quinto, San Jose, CA (US);
Michael T. Templeton, Atherton, CA (US);
Bharath Rangarajan, Santa Clara, CA (US);
Ramkumar Subramanian, San Jose, CA (US);
Khoi A. Phan, San Jose, CA (US);
Ursula Q. Quinto, San Jose, CA (US);
Michael T. Templeton, Atherton, CA (US);
GLOBALFOUNDRIES Inc., Grand Cayman, KY (US);
Abstract
The present invention provides a system and methodology for dummy-dispensing resist though a dispense head while mitigating waste associated with the dummy-dispense process. The dummy dispensed resist is returned to a reservoir from which it was taken. Between substrate applications, the dispense head can be positioned to dispense resist into a return line. The flow of resist from the dispense head keeps resist from drying at the dispense head. By funneling the dummy-dispensed resist into a return line with low volume, for example, waste from the dummy-dispensing process can be mitigated.