The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2009
Filed:
Mar. 09, 2007
Applicants:
David H. Bernstein, Oakland, CA (US);
Roger T. Howe, Los Gatos, CA (US);
Emmanuel P. Quevy, El Cerrito, CA (US);
Inventors:
David H. Bernstein, Oakland, CA (US);
Roger T. Howe, Los Gatos, CA (US);
Emmanuel P. Quevy, El Cerrito, CA (US);
Assignee:
Silicon Clocks, Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16H 33/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
A MEMS structure having a compensated resonating member is described. In an embodiment, a MEMS structure comprises a resonating member coupled to a substrate by an anchor. A dynamic mass-load is coupled with the resonating member. The dynamic mass-load is provided for compensating a change in frequency of the resonating member by altering the moment of inertia of the resonating member by way of a positional change relative to the anchor.