The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2009
Filed:
Jun. 28, 2006
Kentaro Nishikata, Kyoto, JP;
Yutaka Saijo, Kyoto, JP;
Shigeru Kakinuma, Kyoto, JP;
Junichi Aoyama, Kyoto, JP;
Satoshi Ohashi, Kyoto, JP;
Kentaro Nishikata, Kyoto, JP;
Yutaka Saijo, Kyoto, JP;
Shigeru Kakinuma, Kyoto, JP;
Junichi Aoyama, Kyoto, JP;
Satoshi Ohashi, Kyoto, JP;
Horiba, Ltd., Kyoto, JP;
Abstract
An object of this invention is to make it easy to adjust a position of the energy beam to irradiate and a position of a focal point of a light collecting mirror part, and to prevent displacement of the light collecting part due to vibration with a simple arrangement. A sample measuring device in accordance with this invention is to measure light generated from a sample W by irradiating electron beams EB on the sample W, and comprises a electron optical column partthat converges the electron beams EB, and a light collecting mirror partthat is arranged between the electron optical column partand the sample W and that has an energy beam pathto pass the electron beams EB converged by the electron optical column partand to irradiate the electron beams EB on the sample W and a mirror facewhose focal point F is set on an axis of the energy beam pathand that collects the light L generated from the sample W by means of the mirror face, wherein the light collecting mirror partis supported by the electron optical column partso that the axis of the electron beams EB coincides with the focal point F.