The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2009
Filed:
Sep. 30, 2005
Douglas Clippinger Allan, Corning, NY (US);
Dana Craig Bookbinder, Corning, NY (US);
Ulrich W H Neukirch, Painted Post, NY (US);
Charlene Marie Smith, Corning, NY (US);
Douglas Clippinger Allan, Corning, NY (US);
Dana Craig Bookbinder, Corning, NY (US);
Ulrich W H Neukirch, Painted Post, NY (US);
Charlene Marie Smith, Corning, NY (US);
Corning Incorporated, Corning, NY (US);
Abstract
Disclosed are synthetic silica glass having a low polarization-induced birefringence, process for making the glass and lithography system comprising optical element made of the glass. The silica glass has a polarization-induced birefringence measured at 633 nm of less than about 0.1 nm/cm when subjected to excimer laser pulses at about 193 nm having a fluence of about 40 μJ·cm·pulseand a pulse length of about 25 ns for 5×10pulses.