The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2009
Filed:
Oct. 05, 2007
Soichi Moriya, Chino, JP;
Takeo Kawase, Suwa, JP;
Mitsuaki Harada, Chino, JP;
Takehisa Saeki, Suwa, JP;
Tomoyuki Okuyama, Chino, JP;
Hirofumi Hokari, Chino, JP;
Takashi Aoki, Suaw, JP;
Soichi Moriya, Chino, JP;
Takeo Kawase, Suwa, JP;
Mitsuaki Harada, Chino, JP;
Takehisa Saeki, Suwa, JP;
Tomoyuki Okuyama, Chino, JP;
Hirofumi Hokari, Chino, JP;
Takashi Aoki, Suaw, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
A method of forming a contact hole includes forming a first conductive layer patterned so as to serve as an electrode or a wiring on a substrate, forming an insulation layer on the substrate and the first conductive layer, inserting a cutting instrument into the insulation layer at an angle to a surface of the insulation layer, the angle being in the range from 5° to 80°, and forming a tapered opening extending to the electrode or the wiring in the insulation layer by drawing out the cutting instrument.