The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2009
Filed:
Jul. 24, 2007
Nobuyuki Kasama, Tokyo, JP;
Nobuyuki Kasama, Tokyo, JP;
Miraial Co., Ltd., Tokyo, JP;
Abstract
A wafer-retaining cushion sheet () has a wafer suction-adhering surface (C) formed on a surface thereof, which adheres by suction to a semiconductor wafer (W). A wafer tray () is provided with a plurality of bottom openings () opening to the reverse side of the wafer-retaining cushion sheet (), an air chamber () communicating with the bottom openings, and an air inlet () for supplying pressurized air into the air chamber () from the outside. Consequently, when pressurized air is supplied into the air chamber () through the air inlet () to increase the air pressure in the air chamber (), the wafer-retaining cushion sheet () is elastically deformed into an inflated form at regions facing the bottom openings (), thus causing separation between the semiconductor wafer (W) and at least a part of the wafer suction-adhering surface (C) of the wafer-retaining cushion sheet ().
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile