The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2009

Filed:

Jun. 01, 2006
Applicant:

Shigetaka Haga, Ibaraki-ken, JP;

Inventor:

Shigetaka Haga, Ibaraki-ken, JP;

Assignee:

Sukegawa Electric Co., Ltd., Takahagi-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An electron bombardment heating apparatus, in which thermions emitted from filaments are accelerated and impinge upon a heating plate, so as to heat the heating plate, wherein a peripheral wall of a heated material supporting member having a heating plate as a ceiling thereof is made of multi-staged peripheral wall portions, positioned vertically and having a different radius, and those peripheral wall portions are connected with each other by means of a ring-like horizontal wall. With this, thermal stress can be mitigated, which is caused due to a difference in temperature between the lower end portion of the heated material supporting member and the heating plate when heating up the heating plate, thereby causing no breakage in the heated material supporting member when conducting heating and cooling upon the heating plate, repetitively.


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