The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2009
Filed:
Jun. 06, 2008
Sheng-shian LI, Greensboro, NC (US);
Seungbae Lee, Greensboro, NC (US);
Kushal Bhattacharjee, Kernersville, NC (US);
Sheng-Shian Li, Greensboro, NC (US);
Seungbae Lee, Greensboro, NC (US);
Kushal Bhattacharjee, Kernersville, NC (US);
RF Micro Devices, Inc., Greensboro, NC (US);
Abstract
The present invention relates to a micro-electro-mechanical systems (MEMS) vibrating structure having dominant lateral vibrations supported by a MEMS anchor system, and includes a single-crystal piezoelectric thin-film layer that has been grown with a specific crystal orientation. Since the MEMS vibrating structure has dominant lateral vibrations, its resonant frequency may be controlled by its size and shape, rather than layer thickness, which provides high accuracy and enables multiple resonators having different resonant frequencies on a single substrate.