The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2009
Filed:
Feb. 13, 2002
Kenji Hoshi, Kawasaki, JP;
Hiroshi Nomura, Kawasaki, JP;
Shigeru Ishibashi, Yokohama, JP;
Yi-yu Shi, Hsinchu, TW;
Kenji Hoshi, Kawasaki, JP;
Hiroshi Nomura, Kawasaki, JP;
Shigeru Ishibashi, Yokohama, JP;
Yi-Yu Shi, Hsinchu, TW;
Fujitsu Microelectronics Limited, Tokyo, JP;
Abstract
Strip-shaped alignment marksare juxtaposed with each other in a silicon oxide filmformed on a silicon wafer. Each alignment markcomprises a plurality of groovesformed side by side in the silicon oxide film. An amorphous silicon filmis buried in the grooves. Thus, the alignment marksare formed in a thus-formed line-and-space pattern. Accordingly, waveforms of detected signals having high contrast and little deformation can be obtained, and alignment of wafers with high accuracy can be realized.