The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2009
Filed:
Mar. 30, 2006
Thorsten Eyhorn, Freiburg, DE;
Moritz Nitschke, Freiburg, DE;
Peter Wiedemuth, Herbolzheim, DE;
Gerhard Zahringer, Freiburg, DE;
Thorsten Eyhorn, Freiburg, DE;
Moritz Nitschke, Freiburg, DE;
Peter Wiedemuth, Herbolzheim, DE;
Gerhard Zahringer, Freiburg, DE;
HUETTINGER Elektronik GmbH + Co. KG, Freiburg, DE;
Abstract
A vacuum plasma generator (VPG) includes an output connector for electrical connection of the VPG to at least one electrode of a plasma chamber. The VPG includes a mains connector for connection of the VPG to a mains power supply, a mains input filter coupled to the mains connector, a voltage converter coupled to the mains input filter for generating an output signal, a voltage converter control input for connection to a voltage converter control, a shield that surrounds at least the voltage converter, the mains power supply, and the mains input filter, and a connection device that provides an electrical connection between the shield and the plasma chamber.