The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2009

Filed:

Jul. 08, 2004
Applicants:

Motoichi Ohtsu, Tokyo, JP;

Motonobu Kourogi, Kanagawa, JP;

Shuji Mononobe, Kanagawa, JP;

Takashi Yatsui, Kanagawa, JP;

Koji Yamamoto, Kanagawa, JP;

Toshiyuki Inokuchi, Tokyo, JP;

Masato Takada, Tokyo, JP;

Inventors:

Motoichi Ohtsu, Tokyo, JP;

Motonobu Kourogi, Kanagawa, JP;

Shuji Mononobe, Kanagawa, JP;

Takashi Yatsui, Kanagawa, JP;

Koji Yamamoto, Kanagawa, JP;

Toshiyuki Inokuchi, Tokyo, JP;

Masato Takada, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/14 (2006.01); H01J 37/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The broad range measurement exploiting the usual propagated light and the high resolution measurement mode exploiting near-field light are to be accomplished with a sole as-assembled optical probe. To this end, light radiated through an optical probehaving a light shielding coating layerformed for defining a light radiating aperture D or light radiated at a coreof the optical probeis propagated, as the optical probeis moved in a direction towards and away from a surface for measurement. The core of the optical probe is coated with a light shielding coating layerIn this manner, a spot of propagated light propagated through the coreor a spot of near-field light seeping from the light radiating aperture D is formed on the surface for measurement, and light derived from the spot of light is detected.


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