The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2009
Filed:
Dec. 08, 2003
Bishnu P. Gogoi, Scottsdale, AZ (US);
Raymond M. Roop, Scottsdale, AZ (US);
Hemant D. Desai, Gilbert, AZ (US);
Bishnu P. Gogoi, Scottsdale, AZ (US);
Raymond M. Roop, Scottsdale, AZ (US);
Hemant D. Desai, Gilbert, AZ (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
In one embodiment, a reflowable layeris deposited over a semiconductor deviceand reflowed in an environment having a pressure approximately equal to that of atmosphere to form a seal layer. The seal layerseals all openingsin the underlying layer of the semiconductor device. Since the reflow is performed at approximately atmospheric pressure a gapwhich was coupled to the openingis sealed at approximately atmospheric pressure, which is desirable for the semiconductor deviceto avoid oscillation. The seal layeris also desirable because it prevents particles from entering the gap. In another embodiment, the seal layeris deposited in an environment having a pressure approximately equal to atmospheric pressure to seal the holewithout a reflow being performed.