The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2009
Filed:
Nov. 29, 2006
Ichio Yudasaka, Chino, JP;
Ichio Yudasaka, Chino, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
A method for manufacturing a semiconductor device includes: forming a lower gate electrode over a substrate; forming a sacrifice film over the substrate such that the lower gate electrode is overlapped with the sacrifice film; forming a semiconductor film over the sacrifice film such that the semiconductor film crosses over the lower gate electrode; removing the sacrifice film; forming a lower gate insulating film in an empty space between the lower gate electrode and the semiconductor film, the empty space being obtained by removing the sacrifice film; forming an upper gate insulating film over the semiconductor film; and forming an upper gate electrode over the upper gate insulating film, the upper gate electrode being electrically connected to the lower gate electrode.