The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2009

Filed:

Jun. 16, 2004
Applicants:

Yasunori Seto, Minato-Ku, JP;

Akira Fujisawa, Minato-Ku, JP;

Yukio Sueyoshi, Minato-Ku, JP;

Inventors:

Yasunori Seto, Minato-Ku, JP;

Akira Fujisawa, Minato-Ku, JP;

Yukio Sueyoshi, Minato-Ku, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 15/00 (2006.01); H01L 31/04 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention provides a transparent conductive substrate having optical transparency and conductivity that have been improved in a well-balanced manner. The transparent conductive substrate of the present invention includes a transparent base and a conductive metal oxide film formed on the base. This metal oxide film contains tin and fluorine. In a profile of the metal oxide film determined in the depth direction by SIMS, the value obtained by subtracting the minimum Imin of the ratio of sensitivity of the fluorine to that of the tin from the maximum Imax thereof is at least 0.15. The maximum Imax is higher than 1 while the minimum Imin is lower than 1. Furthermore, the position where the maximum Imax is obtained is closer to the surface of the metal oxide film as compared to the position where the minimum Imin is obtained.


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