The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2009
Filed:
Jan. 03, 2008
Applicants:
Jong-pal Kim, Seoul, KR;
Kun-soo Shin, Seongnam-si, KR;
Sang-kon Bae, Seongnam-si, KR;
Youn-ho Kim, Hwaseong-si, KR;
Inventors:
Jong-pal Kim, Seoul, KR;
Kun-soo Shin, Seongnam-si, KR;
Sang-kon Bae, Seongnam-si, KR;
Youn-ho Kim, Hwaseong-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 9/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
A pressure sensor includes at least one cantilever formed on an upper surface of a silicon substrate, a piezoresistor formed on a fixed end of the cantilever, and a metal wire and an electrode pad connected to both ends of the piezoresistor, wherein a stopper that limits a deformation of a free end of the cantilever is formed below the cantilever.