The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2009
Filed:
Mar. 07, 2006
Yi-ping Hsin, Dublin, CA (US);
Hideyuki Hashimoto, Kumagaya, JP;
Jin Nishikawa, Kumagaya, JP;
Bausan Yuan, San Jose, CA (US);
Douglas C. Watson, Campbell, CA (US);
Yi-Ping Hsin, Dublin, CA (US);
Hideyuki Hashimoto, Kumagaya, JP;
Jin Nishikawa, Kumagaya, JP;
Bausan Yuan, San Jose, CA (US);
Douglas C. Watson, Campbell, CA (US);
Nikon Corporation, Tokyo, JP;
Abstract
A precision assembly () for positioning a device () includes a stage () that retains the device (), a dual mover assembly () that moves the stage (), and the device () along a movement axis (), a measurement system () and a control system (). The dual mover assembly () includes a first mover () that moves the stage () along the movement axis () and a second mover () that moves the device () along the movement axis (). The second mover () is rigidly coupled to the first mover () so that movement of the first mover () results in movement of the second mover (). Further, the total output of the dual mover assembly () along the movement axis () is equal to the sum of the movement of the first mover () and the movement of the second mover (). The measurement system () measures a movement position along the movement axis (). The control system () controls the dual mover assembly () utilizing the movement position. The control system () is designed to effectively decouple the control of the first mover () from the control of the second mover (). Further, the control system () includes a quantization feedforward loop.