The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2009
Filed:
Mar. 03, 2006
Eiji Nakashio, Miyagi, JP;
Junichi Honda, Miyagi, JP;
Takashi Tamura, Miyagi, JP;
Koji Suzuki, Miyagi, JP;
Teruo Inaguma, Miyagi, JP;
Manabu Aizawa, Miyagi, JP;
Kazuo Takahashi, Miyagi, JP;
Tadashi Sakurai, Miyagi, JP;
Eiji Nakashio, Miyagi, JP;
Junichi Honda, Miyagi, JP;
Takashi Tamura, Miyagi, JP;
Koji Suzuki, Miyagi, JP;
Teruo Inaguma, Miyagi, JP;
Manabu Aizawa, Miyagi, JP;
Kazuo Takahashi, Miyagi, JP;
Tadashi Sakurai, Miyagi, JP;
Sony Corporation, Tokyo, JP;
Abstract
There is a need for a piezoelectric element capable of improving a productivity and a yield without impairing the piezoelectric characteristic and a method for manufacturing the same. A piezoelectric element is provided with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film having a predetermined thickness is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization. In this manner, a piezoelectric film exhibiting uniform crystallinity in the film thickness direction may be produced.