The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 01, 2009

Filed:

Jul. 26, 2005
Applicants:

Robert J. Calvet, Pasadena, CA (US);

Roman C. Gutierrez, Arcadia, CA (US);

Darrell Harrington, Pasadena, CA (US);

Tony K. Tang, Glendale, CA (US);

Inventors:

Robert J. Calvet, Pasadena, CA (US);

Roman C. Gutierrez, Arcadia, CA (US);

Darrell Harrington, Pasadena, CA (US);

Tony K. Tang, Glendale, CA (US);

Assignee:

Siimpel Corporation, Arcadia, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

In accordance with an embodiment of the present invention, an electrostatic actuator has a base having a plurality of base pillars formed thereon and has a stage having a plurality of stage pillars formed thereon. The controlled application of voltage signals to the base pillars and/or the stage pillars results in electrostatic force that effects movement of the stage with respect to the base.


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