The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2009
Filed:
Nov. 08, 2005
Stephen M. Sabol, Orlando, FL (US);
Ramesh Subramanian, Oviedo, FL (US);
Anand A. Kulkarni, Orlando, FL (US);
Stephen M. Sabol, Orlando, FL (US);
Ramesh Subramanian, Oviedo, FL (US);
Anand A. Kulkarni, Orlando, FL (US);
Siemens Energy, Inc., Orlando, FL (US);
Abstract
A component for use in a combustion turbine () is provided that includes a substrate () and a microelectromechanical system (MEMS) device () affixed to the substrate (). At least one connector () may be deposited in electrical communication with the MEMS device () for routing a data signal from the MEMS device () to a termination location (). A barrier coating () may be deposited on the substrate () wherein the MEMS device () is affixed beneath a surface of the barrier coating (). A plurality of trenches () may be formed in the barrier coating () at respective different depths below the surface of the barrier coating () and a MEMS device () deposited within each of the plurality of trenches (). A monitoring system () is provided that may include a processing module () programmed for receiving data from the MEMS device ().