The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2009
Filed:
Feb. 24, 2006
Applicants:
Yasumitsu Tomita, Handa, JP;
Hideyoshi Tsuruta, Tokai, JP;
Inventors:
Yasumitsu Tomita, Handa, JP;
Hideyoshi Tsuruta, Tokai, JP;
Assignee:
NGK Insulators, Ltd., Nagoya-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3065 (2006.01); C23C 16/50 (2006.01); C23C 16/503 (2006.01); C23C 16/509 (2006.01); C23C 16/46 (2006.01);
U.S. Cl.
CPC ...
Abstract
A plasma processing member includes a ceramic base, a plasma generating electrode embedded in the ceramic base, and an electrode power supply member connected to the plasma generating electrode. The impedance of the plasma processing member when plasma is generated using high frequency power at a frequency higher than 13.56 MHz is adjusted to 25Ω or less.