The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2009
Filed:
Mar. 07, 2007
Applicant:
Hirohiko Shinonaga, Utsunomiya, JP;
Inventor:
Hirohiko Shinonaga, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03B 27/42 (2006.01);
U.S. Cl.
CPC ...
Abstract
An exposure apparatus for exposing a substrate by scanning a reticle and the substrate relative to each other includes a projection optical system configured to project a pattern of the reticle onto the substrate, and a field stop configured to define a slit-shaped exposure area, and to change a length of the exposure area in a scanning direction in accordance with a change of a length of the exposure area in a direction orthogonal to the scanning direction.