The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2009
Filed:
Oct. 02, 2007
Taichiro Tamida, Tokyo, JP;
Takafumi Nakagawa, Tokyo, JP;
Ikuro Suga, Tokyo, JP;
Hiroyuki Osuga, Tokyo, JP;
Toshiyuki Ozaki, Tokyo, JP;
Taichiro Tamida, Tokyo, JP;
Takafumi Nakagawa, Tokyo, JP;
Ikuro Suga, Tokyo, JP;
Hiroyuki Osuga, Tokyo, JP;
Toshiyuki Ozaki, Tokyo, JP;
Mitsubishi Electric Corporation, Tokyo, JP;
Abstract
A power supply apparatus for controlling an ion accelerator includes a controller configured to adjust magnitude of ion acceleration in the ion accelerator. The controller controls an anode voltage applied to an anode electrode of the ion accelerator, a gas flow rate of gas flowing through a gas flow rate regulator of the ion accelerator, and magnetic flux density at an ion exit of the ion accelerator to satisfy a formula given as follows: where S is a sectional area of the ion exit [m]; d is an ion accelerating region length [m]; β is a magnetic flux bias ratio; Va is anode voltage [V]; Q is gas flow rate [sccm]; and B is magnetic flux density at the ion exit [T].