The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2009
Filed:
Jun. 11, 2007
Shuit-tong Lee, Hong Kong, HK;
Wen-jun Zhang, Hong Kong, HK;
You-sheng Zou, Hong Kong, CN;
Igor Bello, Hong Kong, HK;
Kwok Leung MA, Hong Kong, HK;
Kar Man Leung, Hong Kong, HK;
Yat Ming Chong, Hong Kong, HK;
Shuit-Tong Lee, Hong Kong, HK;
Wen-Jun Zhang, Hong Kong, HK;
You-Sheng Zou, Hong Kong, CN;
Igor Bello, Hong Kong, HK;
Kwok Leung Ma, Hong Kong, HK;
Kar Man Leung, Hong Kong, HK;
Yat Ming Chong, Hong Kong, HK;
City University of Hong Kong, Hong Kong, CN;
Abstract
A surface acoustic wave (SAW) device which is made of cBN/diamond composite structures and the fabrication method are disclosed. In the SAW device based on cubic boron nitride and diamond composite structures, the diamond hard layer includes randomly-oriented polycrystalline diamond (poly-D), oriented (heteroepitaxial) diamond, single-crystal diamond wafers and nanocrystalline diamond (nano-D) films. The cBN film with a sound velocity close to that of diamond serves as the piezoelectric layer, which was directly deposited on diamond hard layer without any soft sp-BN incubation layer by ion assisted physical vapor deposition (PVD) and plasma-enhanced (or ion assisted) chemical vapor deposition (PECVD). Due to the high sound velocity and the low velocity dispersion between the cBN and diamond layered materials, the present SAW device based on cubic boron nitride and diamond composite structures can improve the device performance and operate at ultra-high frequency range.