The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2009
Filed:
May. 16, 2007
Applicants:
Alexandra Abbadie, Le Versoud, FR;
Jochen Maehliss, Karlstein, DE;
Bernd Kolbesen, Bad Homburg, DE;
Inventors:
Assignee:
S.O.I.Tec Silicon on Insulator Technologies, Bernin, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 7/26 (2006.01); C11D 7/08 (2006.01); C11D 7/10 (2006.01); H01L 21/00 (2006.01); B08B 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to a method for characterizing defects on silicon surfaces, such as silicon wafers, a method for treating silicon surfaces with an etching solution, and an etching solution to be employed in the treating and defect characterization of such silicon wafer surfaces.