The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2009
Filed:
Nov. 24, 2004
Shigemasa Suga, Noda, JP;
Shigeru Kamon, Noda, JP;
Takashi Yata, Osaka, JP;
Akihiro Terai, Tokyo, JP;
Shigemasa Suga, Noda, JP;
Shigeru Kamon, Noda, JP;
Takashi Yata, Osaka, JP;
Akihiro Terai, Tokyo, JP;
Kishimoto Sangyo Co., Ltd., Osaka-Shi, JP;
Fine Polymers Corporation, Tokyo, JP;
Abstract
The invention has for its object the provision of a cleaner capable of removing particles and metal impurities present on the surface of a wafer without corrosion of wirings, gates or the like yet at normal temperature in a short period of time and with a one-pack type solution. To accomplish the above object, the invention provides a cleaner that is an aqueous solution containing phosphoric acid, hydrofluoric acid, and ammonia and/or amine, and having a pH ranging from 2 to 12, wherein the aqueous solution comprises 0.5 to 25 mass % of phosphoric acid, 0.1 to 10 mass % of ammonia and/or amine, and 5×10to 5.0 mass % of hydrofluoric acid.