The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2009
Filed:
Oct. 12, 2004
Kazutaka Yanagita, Yokohama, JP;
Kazuaki Ohmi, Yokohama, JP;
Kiyofumi Sakaguchi, Yokohama, JP;
Canon Kabuhsiki Kaisha, Tokyo, JP;
Abstract
This invention is to provide a technique of separating bonded substrate stacks having porous layers at a high yield. A separating apparatus () has a pair of substrate holding portions (). A bonded substrate stack () is sandwiched from upper and lower sides and horizontally held by the substrate holding portions () and rotated. A jet is ejected from a nozzle () and injected into the porous layer of the bonded substrate stack (), thereby separating the bonded substrate stack () into two substrates at the porous layer. Another separating apparatus () has a pair of substrate holding portions (), a nozzle () of rejecting a fluid to the porous layer of a bonded substrate stack (), and an abrupt operation prevention mechanism () for preventing the lower substrate holding portion () from abruptly moving downward but allowing it to moderately move when separating the bonded substrate stack ().