The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7579224 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 25, 2009

Filed:

Jan. 11, 2006
Applicants:

Hideaki Kuwabara, Kanagawa, JP;

Hiroko Yamamoto, Kanagawa, JP;

Inventors:

Hideaki Kuwabara, Kanagawa, JP;

Hiroko Yamamoto, Kanagawa, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/84 (2006.01); H01L 21/3205 (2006.01); H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract

It is an object of the present invention to simplify steps needed to process a wiring in forming a multilayer wiring. In addition, when a droplet discharging technique or a nanoimprint technique is used to form a wiring in a contact hole having a comparatively long diameter, the wiring in accordance with the shape of the contact hole is formed, and the wiring portion of the contact hole is likely to have a depression compared with other portions. A penetrating opening is formed by irradiating a light-transmitting insulating film with laser light having high intensity and a pulse high in repetition frequency. A plurality of openings having a minute contact area is provided instead of forming one penetrating opening having a large contact area to have an even thickness of a wiring by reducing a partial depression and also to ensure contact resistance.


Find Patent Forward Citations

Kuwabara, Hideaki. (2009). Method for manufacturing a thin film semiconductor device (U.S. Patent No. 7579224). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7579224

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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