The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2009
Filed:
Jan. 22, 2008
Giulio Riccoti, Broni, IT;
Marco Morelli, Bareggio, IT;
Luigi Della Torre, Lissone, IT;
Andrea Lorenzo Vitali, Bergamo, IT;
Ubaldo Mastromatteo, Bareggio, IT;
Giulio Riccoti, Broni, IT;
Marco Morelli, Bareggio, IT;
Luigi Della Torre, Lissone, IT;
Andrea Lorenzo Vitali, Bergamo, IT;
Ubaldo Mastromatteo, Bareggio, IT;
STMicroelectronics S.r.l., Agrate Brianza, IT;
Abstract
In a pressure sensor with double measuring scale: a monolithic body of semiconductor material has a first main surface, a bulk region and a sensitive portion upon which pressure acts; a cavity is formed in the monolithic body and is separated from the first main surface by a membrane, which is flexible and deformable as a function of the pressure, and is arranged inside the sensitive portion and is surrounded by the bulk region; a low-pressure detecting element of the piezoresistive type, sensitive to first values of pressure, is integrated in the membrane and has a variable resistance as a function of the deformation of the membrane; in addition, a high-pressure detecting element, also of a piezoresistive type, is formed in the bulk region inside the sensitive portion and has a variable resistance as a function of the pressure. The high-pressure detecting element is sensitive to second values of pressure.