The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2009
Filed:
Jun. 12, 2007
Applicant:
Kazuhiro Matsuhisa, Tokyo, JP;
Inventor:
Kazuhiro Matsuhisa, Tokyo, JP;
Assignee:
Sony Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/56 (2006.01); G01P 9/04 (2006.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
Abstract
An inertial sensor and a fabrication method of an inertial sensor are provided. An inertial sensor includes: an elastic support whose one end is supported by a support part disposed on a substrate; an oscillator which is supported by the other end of the elastic support as it is separated from the substrate; and a displacement detecting part which detects a displacement of the oscillator to output a signal, wherein the oscillator is formed with one or both of a groove and a through hole in a direction in parallel with a drive direction of the oscillator.