The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2009
Filed:
Sep. 12, 2007
Takuma Okamuro, Nagano-ken, JP;
Motonori Okumura, Nagano-ken, JP;
Mutsuhiko Ota, Nagano-ken, JP;
Kazutoshi Goto, Nagano-ken, JP;
Isao Yanagisawa, Chino, JP;
Yasuo Inaoka, Shiojiri, JP;
Takuma Okamuro, Nagano-ken, JP;
Motonori Okumura, Nagano-ken, JP;
Mutsuhiko Ota, Nagano-ken, JP;
Kazutoshi Goto, Nagano-ken, JP;
Isao Yanagisawa, Chino, JP;
Yasuo Inaoka, Shiojiri, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
An alignment apparatus, which is used when positioning and joining a plurality of workpieces relative to each other, each workpiece having a plurality of alignment marks for alignment, the alignment apparatus includes: a transparent mask provided with reference marks with which the alignment marks are aligned; a mirror disposed between the mask and the workpiece; an optical unit having an optical axis pointed in a direction of the mirror via the reference mark from a side of the mask opposite to the mirror, the optical unit enabling the reference mark and a virtual image of the reference mark reflected in the mirror to be observed simultaneously; and an adjusting unit for making optical axis adjustment of the optical axis, based on the observation by the optical unit, such that a real image of the reference mark and the virtual image of the reference mark reflected in the mirror are superposed.