The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2009
Filed:
Nov. 16, 2005
Applicant:
Robert Wagner, Neuburg am Inn, DE;
Inventor:
Robert Wagner, Neuburg am Inn, DE;
Assignee:
Micro-Epsilon Messtechnik GmbH & Co. KG, Ortenburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Method and apparatus for optically testing the quality of objects such as silicon wafers which have a circular peripheral edge, wherein light is directed onto the edge region of the object, and the light radiating from the object due to reflection, refraction and/or diffraction is detected by means of a measuring unit which produces an image from the received light. Defects on and/or in the object are identified from the produced image.