The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2009
Filed:
Mar. 24, 2004
Toshihisa Tomie, Tsukuba, JP;
Toshihisa Tomie, Tsukuba, JP;
Abstract
The present invention provides a method of delivering solid material at a position far enough from any surrounding solid with high enough target density without scattering debris to the environment. In the present invention, radiation is generated from plasma produced by laser irradiation on a material. This material is a cluster of particles that is composed of many fine particles bound together with a binder that vaporizes at temperature lower than melting point of fine particles. Density of particles in a particle-clusteris increased by vaporizing a solventby heating a dropletwith the irradiation of laser. Solvent of a droplet occupies large fraction of the droplet in order to stabilize droplet generation. This solvent is vaporized prior to delivery to a vacuum chamberfor plasma generation. This vaporization helps to avoid degradation of vacuum of the chamber. The diameter of a particle-cluster thus condensed is several tens μm.