The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2009
Filed:
Nov. 17, 2000
Xiangxin BI, San Ramon, CA (US);
Ronald J. Mosso, Fremont, CA (US);
Shivkumar Chiruvolu, Sunnyvale, CA (US);
Sujeet Kumar, Newark, CA (US);
James T. Gardner, Cupertino, CA (US);
Seung M. Lim, Livermore, CA (US);
William E. Mcgovern, LaFayette, CA (US);
Xiangxin Bi, San Ramon, CA (US);
Ronald J. Mosso, Fremont, CA (US);
Shivkumar Chiruvolu, Sunnyvale, CA (US);
Sujeet Kumar, Newark, CA (US);
James T. Gardner, Cupertino, CA (US);
Seung M. Lim, Livermore, CA (US);
William E. McGovern, LaFayette, CA (US);
NanoGram Corporation, Milpitas, CA (US);
Abstract
Light reactive deposition uses an intense light beam to form particles that are directly coated onto a substrate surface. In preferred embodiments, a coating apparatus comprising a noncircular reactant inlet, optical elements forming a light path, a first substrate, and a motor connected to the apparatus. The reactant inlet defines a reactant stream path. The light path intersects the reactant stream path at a reaction zone with a product stream path continuing from the reaction zone. The substrate intersects the product stream path. Also, operation of the motor moves the first substrate relative to the product stream. Various broad methods are described for using light driven chemical reactions to produce efficiently highly uniform coatings.