The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2009
Filed:
Dec. 01, 2008
Yoichi Mochida, Chigasaki, JP;
Yoichi Mochida, Chigasaki, JP;
Murata Manufacturing Co., Ltd., Kyoto, JP;
Abstract
An acceleration sensor includes a frame-shaped beam portion disposed above an XY substrate surface of a base in a floating state and a beam-portion supporting/fixing unit arranged to attach the beam portion to the base with support portions so as to be supported on two sides. The acceleration sensor also includes weight portions disposed above the XY substrate surface of the base in a floating state and connecting portions for attaching the weight portions to the beam portion in a cantilever state. The weight portions are movable in three axial directions including an X-axis direction, a Y-axis direction, and a Z-axis direction when the beam portion is deflected. The beam portion is provided with an X-axis-direction acceleration detection unit arranged to detect an acceleration in the X-axis direction, a Y-axis-direction acceleration detection unit arranged to detect an acceleration in the Y-axis direction, and a Z-axis-direction acceleration detection unit arranged to detect an acceleration in the Z-axis direction. The Z-axis-direction acceleration detection unit is disposed near proximal ends of Y-axis-direction extending portions of the beam portion, and the Y-axis-direction acceleration detection unit is disposed near distal ends of the Y-axis-direction extending portions.