The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7573659 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 11, 2009

Filed:

Oct. 26, 2007
Applicants:

Ichiro Onuki, Kawasaki, JP;

Kenichi Kobayashi, Utsunomiya, JP;

Kenji Yoshida, Utsunomiya, JP;

Jun Ota, Utsunomiya, JP;

Inventors:

Ichiro Onuki, Kawasaki, JP;

Kenichi Kobayashi, Utsunomiya, JP;

Kenji Yoshida, Utsunomiya, JP;

Jun Ota, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 7/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A holding apparatus for holding an optical element includes a measuring part configured to measure a coordinate of the optical element, and a driving part configured to move the optical element based on the coordinate measured by the measuring part, wherein the measuring part includes a first sensor configured to detect a displacement amount of a part of the optical element, and a second sensor configured to detect that a part of the optical element is located at a predetermined position.


Find Patent Forward Citations

Onuki, Ichiro. (2009). Optical element holding apparatus and exposure apparatus (U.S. Patent No. 7573659). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7573659

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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