The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2009
Filed:
Jul. 25, 2006
Hyuck Choo, Albany, CA (US);
David Garmire, El Cerrito, CA (US);
Richard S. Muller, Kensington, CA (US);
James Demmel, Berkeley, CA (US);
Hyuck Choo, Albany, CA (US);
David Garmire, El Cerrito, CA (US);
Richard S. Muller, Kensington, CA (US);
James Demmel, Berkeley, CA (US);
The Regents of the University of California, Oakland, CA (US);
Abstract
The present invention relates to systems and methods for fabricating microscanners. The fabrication processes employed pursuant to some embodiments are compatible with well known CMOS fabrication techniques, allowing devices for control, monitoring and/or sensing to be integrated onto a single chip. Both one- and two-dimensional microscanners are described. Applications including optical laser surgery, maskless photolithography, portable displays and large scale displays are described.