The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2009
Filed:
Nov. 16, 2006
Applicants:
Carl L. White, Gilbert, AZ (US);
Paul G. Curry, Phoenix, AZ (US);
Inventors:
Carl L. White, Gilbert, AZ (US);
Paul G. Curry, Phoenix, AZ (US);
Assignee:
ASM America, Inc., Phoenix, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 1/42 (2006.01);
U.S. Cl.
CPC ...
Abstract
A valve comprises a valve seat and a movable diaphragm. The valve seat defines a fluid orifice and is formed at least partially of polybenzimidazole. The diaphragm is sized and configured to bear against the fluid orifice to substantially block fluid flow through the orifice. The valve is advantageously used in a hot zone of a semiconductor processing system.