The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2009
Filed:
May. 23, 2007
Yook-kong Yong, Princeton, NJ (US);
Mihir S Patel, New Brunswick, NJ (US);
Shigeo Kanna, Nagano-ken, JP;
Masako Tanaka, Okaya, JP;
Yook-Kong Yong, Princeton, NJ (US);
Mihir S Patel, New Brunswick, NJ (US);
Shigeo Kanna, Nagano-ken, JP;
Masako Tanaka, Okaya, JP;
Seiko Epson Corporation, Tokyo, JP;
Rutgers, The State University of New Jersey, New Brunswick, NJ (US);
Abstract
An angular velocity sensor includes a protrusion protruding in a Y'-axis direction and extending in an X-axis direction on a main surface of a rotated Y cut quartz plate, and an excitation electrode and a detection electrode formed on the main surface adjacent to this protrusion. This excitation electrode excites thickness-shear vibration in the X-axis direction on the quartz substrate, exiting vibration on the protrusion. Then, the protrusion is bent and displaced due to Coriolis force acting in a direction orthogonal to the vibration of the protrusion corresponding to a rotation around an Y′ axis. This displacement at the protrusion is applied to the quartz substrate as stress. The detection electrode detects change of this stress, thereby angular speed added to the angular velocity sensor is detected.