The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2009
Filed:
Mar. 12, 2007
Applicants:
Ralf Schmid, Narzissenweg, DE;
Thomas Schwedes, Muehldorf, DE;
Inventors:
Ralf Schmid, Narzissenweg, DE;
Thomas Schwedes, Muehldorf, DE;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 23/225 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method and apparatus for reducing or eliminating crosstalk between a plurality of electron beams is described. The plurality of electron beams may produce test areas on a large area substrate that are adjacent wherein secondary electrons from one test area may be detected in an adjacent test area. In one embodiment, the timing of a primary beam emission and detection of secondary electrons from that primary beam is controlled to eliminate or reduce the possibility of detection of secondary electrons from another primary beam.