The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2009
Filed:
May. 05, 2006
Seung Soo Hong, Daejeon, KR;
Yong Hyeon Shin, Daejeon, KR;
Kwang Hwa Chung, Daejeon, KR;
IN Tae Lim, Daejeon, KR;
Seung Soo Hong, Daejeon, KR;
Yong Hyeon Shin, Daejeon, KR;
Kwang Hwa Chung, Daejeon, KR;
In Tae Lim, Daejeon, KR;
Abstract
An apparatus and method for in-situ calibration of a vacuum gauge by absolute method and comparison method, which can carry out absolute calibration using a static type standard for measuring pressures of vacuum chambers by expanding and moving gas between four vacuum chambers of different volumes in order, and comparison calibration of vacuum gauges in an in-situ state without movement of the vacuum gauges according to a method for controlling gas flow through an orifice using a calibrated standard vacuum gauge. Thus, the absolute calibration and the comparative calibration of the vacuum gauges which have been separately carried out by different apparatuses till now can be carried out by just one apparatus, whereby economical efficiency and convenience in calibration of vacuum gauges are maximized.