The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 04, 2009

Filed:

Aug. 29, 2005
Applicants:

Catherine Le Guet, La Motte-Servolex, FR;

Jean-pierre Desbiolles, Cruseilles, FR;

Hisanori Kambara, Villy-le-Pelloux, FR;

Erwan Godot, Moncenis, FR;

Raphael Sylvestre, Montmoison, FR;

Inventors:

Catherine Le Guet, La Motte-Servolex, FR;

Jean-Pierre Desbiolles, Cruseilles, FR;

Hisanori Kambara, Villy-le-Pelloux, FR;

Erwan Godot, Moncenis, FR;

Raphael Sylvestre, Montmoison, FR;

Assignee:

Alcatel, Paris, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

In apparatus of the invention, a transport pod () can be coupled to an article-passing opening () of process equipment () in leaktight manner with sealing being provided by an interposed interface peripheral gasket (). The pod door () can be secured selectively to the interface door () so that they can be moved together as a unit along an axial stroke followed by a transverse stroke under drive from door actuator means (). The transport pod () is held by retaining means (). The peripheral volume () around the two doors can be pumped out by means of a pump () and a duct (). The pod door () can be locked on the transport door () by locking means () that guarantee good sealing while the transport pod () is separate from the process equipment (). This ensures good sealing of the transport pod (), and enables the doors () to be opened under a vacuum without polluting the inside atmosphere.


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