The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2009
Filed:
Oct. 18, 2006
Tetsuro Fukui, Yokohama, JP;
Kenichi Takeda, Yokohama, JP;
Takanori Matsuda, Chofu, JP;
Hiroshi Funakubo, Yokohama, JP;
Shintaro Yokoyama, Yokohama, JP;
Tetsuro Fukui, Yokohama, JP;
Kenichi Takeda, Yokohama, JP;
Takanori Matsuda, Chofu, JP;
Hiroshi Funakubo, Yokohama, JP;
Shintaro Yokoyama, Yokohama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Tokyo Institute of Technology, Tokyo, JP;
Abstract
To provide a film forming method capable of obtaining a high-quality perovskite type oxide thin film, piezoelectric element having a piezoelectric substance constituted of the thin film formed by the film forming method, liquid discharge head having the piezoelectric element and liquid discharge apparatus having the liquid discharge head. A method for forming a perovskite type oxide thin film having a composition expressed by (A1, A2A3) (B1, B2, B3, B4B5)Ois included, which is a film forming method having a plurality of steps for supplying a material containing the elements onto the substrate, dividing the elements A1 to A3 and B1 to B5 into a plurality of groups and supplying each material containing the elements included in the groups onto the substrate in separate steps.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile