The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2009
Filed:
Dec. 11, 2007
Yoshiyuki Takata, Toyonaka, JP;
Takayuki Miyagawa, Toyonaka, JP;
Kunishige Edamatsu, Toyonaka, JP;
Sumitomo Chemical Company, Limited, Tokyo, JP;
Abstract
The present invention provides a chemically amplified resist composition comprising a resin which comprises a structural unit having an acid-labile group and a structural unit represented by the formula (I): wherein Rrepresents a hydrogen atom or a methyl group, ring X represents a C3-C30 cyclic hydrocarbon group in which one —CH— is substituted with —COO—, and at least one hydrogen atom in the C3-C30 cyclic hydrocarbon group may be substituted, and p represents an integer of 1 to 4, and which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, anda salt represented by the formula (II): wherein Yand Yeach independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, Arepresents an organic counter ion, and Rrepresents a C1-C30 hydrocarbon group which may be substituted and at least one —CH— in the C1-C30 hydrocarbon group may be substituted with —CO— or —O—.