The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2009
Filed:
Oct. 08, 2004
Andreas Bibl, Los Altos, CA (US);
Zhenfang Chen, Cupertino, CA (US);
Jeffrey Birkmeyer, San Jose, CA (US);
Andreas Bibl, Los Altos, CA (US);
Zhenfang Chen, Cupertino, CA (US);
Jeffrey Birkmeyer, San Jose, CA (US);
FUJIFILM Dimatix, Inc., Lebanon, NH (US);
Abstract
A microfabricated device and method for forming a microfabricated device are described. A thin membrane including silicon is formed on a silicon body by bonding a silicon-on-insulator substrate to a silicon substrate. The handle and insulator layers of the silicon-on-insulator substrate are removed, leaving a thin membrane of silicon bonded to a silicon body such that no intervening layer of insulator material remains between the membrane and the body. A piezoelectric layer is bonded to the membrane.