The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2009
Filed:
Dec. 11, 2006
Jun Watanabe, Ina, JP;
Jun Watanabe, Ina, JP;
Epson Toyocom Corporation, Tokyo, JP;
Abstract
An objective is to provide an acceleration sensor element that has a high detection sensitivity and that realizes an accurate measurement of acceleration; and an acceleration sensor including this acceleration sensor element to realize a smaller size and a thinner thickness. An acceleration sensor element comprises a quartz, has a thickness in a Z axis direction, and is formed in a quartz substrate developed in an orthogonal XY plane. A thin-walled section of a bottom section of a concave section of the quartz substrate has a double-ended vibrating reed in which a pair of vibration arms extend in a Y axis direction. When acceleration in a Z axis direction is applied while this double-ended vibrating reed having bending vibration, the acceleration is detected based on a change in a resonance frequency caused when the double-ended vibrating reed deflects in the Z axis direction.