The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2009
Filed:
Mar. 21, 2005
Hiroto Sugahara, Ama-gun, JP;
Kazuo Kobayashi, Kakamigahara, JP;
Motohiro Yasui, Nagoya, JP;
Jun Akedo, Tsukuba, JP;
Sou Baba, Tsukuba, JP;
Hiroto Sugahara, Ama-gun, JP;
Kazuo Kobayashi, Kakamigahara, JP;
Motohiro Yasui, Nagoya, JP;
Jun Akedo, Tsukuba, JP;
Sou Baba, Tsukuba, JP;
Brother Kogyo Kabushik Kaisha, Nagoya, JP;
National Institute of Advanced Industrial Science and Technology, Tokyo, JP;
Abstract
A piezoelectric material layer is easily formed on a partial region of the substrate surface. By forming a different hardness material layer that has a different hardness from that of the substrate in the form of a pattern on the surface of the substrate, a film-deposition permitting region A to which particles of a piezoelectric material in a carrier gas adhere in a form of a film and a film-deposition inhibiting region B which inhibits the formation of a film are provided. Further, when a carrier gas containing particles of a piezoelectric material are ejected onto the surface of the substrate by means of AD, a film-like piezoelectric material layer is formed as a result of the adhesion of the particles in the film-deposition permitting region A. As a result, the piezoelectric material layer can be formed easily in a partial region of the surface of the substrate.