The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2009
Filed:
Jan. 23, 2007
Guoheng Zhao, Milpitas, CA (US);
Zheng Yan, San Jose, CA (US);
BO LI, Palo Alto, CA (US);
Wayne Chen, Palo Alto, CA (US);
Guoheng Zhao, Milpitas, CA (US);
Zheng Yan, San Jose, CA (US);
Bo Li, Palo Alto, CA (US);
Wayne Chen, Palo Alto, CA (US);
3i Systems Corporation, Sunnyvale, CA (US);
Abstract
The radiation beam of discrete light source such as LEDs is shaped by a cylindrical lens and a spherical lens to form two perpendicular narrow lines to illuminate a surface. The first line is projected onto a sample surface to improve illumination efficiency, and the second line is projected onto a pupil plane of an imaging lens to improve illumination uniformity. The layout of the LED chip is optimized to match the aspect ratio of the imaging detector. Multiple LEDs at different wavelengths are combined to improve sensitivity. The full surface of the sample is inspected through the relative motion between the sample and the optics.